RESOURCES

White papers

The challenges and solutions of building MEMS devices using the beol metal layers of a solid-state CMOS semiconductor process

This paper covers the problems faced by current production methods for MEMS sensors, in particular the difficulty of ramping up production to meet the ever-increasing demand for sensors. It then discusses the challenges of the solution of building MEMS using only standard CMOS processes in a fab and how they have been solved by Nanusens using techniques that are now patent pending. The focus of this paper is on linear inertial sensors as a worked example of how these techniques can be used. Further papers will explore their use for other types of sensors that can also be built using CMOS and, crucially, simultaneously on the same die at the same time.

Drag & Drop Files, Choose Files to Upload
Upload file (max. 10MB)
Drag & Drop Files, Choose Files to Upload
Upload file (max. 10MB)

Candidate Data Notice
By submitting your application, you acknowledge and agree that Nanusens Ltd will process your personal data in accordance with our Privacy Policy.Data Controller: Nanusens Ltd, Av. del Parc Tecnològic, 3 – CENTRE, 08290 Cerdanyola del Vallès, Barcelona, Spain.
Purpose: To evaluate your application for current and future job opportunities.
Retention: Your data will be stored for up to 24 months unless you request earlier deletion.
Sharing: We do not share your data with third parties, except when legally required or with service providers under confidentiality agreements.
Rights: You may request access, rectification, deletion, or restriction of your data, or withdraw consent, by contacting info@nanusens.com. You may also file a complaint with the Spanish Data Protection Authority (AEPD).
For full details, please refer to our Privacy Policy.

Drag & Drop Files, Choose Files to Upload
Upload file (max. 10MB)
Drag & Drop Files, Choose Files to Upload
Upload file (max. 10MB)
Candidate Data Notice
By submitting your application, you acknowledge and agree that Nanusens Ltd will process your personal data in accordance with our Privacy Policy.
Data Controller: Nanusens Ltd, Av. del Parc Tecnològic, 3 – CENT, 08290 Cerdanyola del Vallès, Barcelona, Spain.
Purpose: To evaluate your application for current and future job opportunities.
Retention: Your data will be stored for up to 24 months unless you request earlier deletion.
Sharing: We do not share your data with third parties, except when legally required or with service providers under confidentiality agreements.
Rights: You may request access, rectification, deletion, or restriction of your data, or withdraw consent, by contacting info@nanusens.com. You may also file a complaint with the Spanish Data Protection Authority (AEPD).
For full details, please refer to our Privacy Policy.
Drag & Drop Files, Choose Files to Upload
Upload file (max. 10MB)
Drag & Drop Files, Choose Files to Upload
Upload file (max. 10MB)
Candidate Data Notice
By submitting your application, you acknowledge and agree that Nanusens Ltd will process your personal data in accordance with our Privacy Policy.
Data Controller: Nanusens Ltd, Av. del Parc Tecnològic, 3 – CENT, 08290 Cerdanyola del Vallès, Barcelona, Spain.
Purpose: To evaluate your application for current and future job opportunities.
Retention: Your data will be stored for up to 24 months unless you request earlier deletion.
Sharing: We do not share your data with third parties, except when legally required or with service providers under confidentiality agreements.
Rights: You may request access, rectification, deletion, or restriction of your data, or withdraw consent, by contacting info@nanusens.com. You may also file a complaint with the Spanish Data Protection Authority (AEPD).
For full details, please refer to our Privacy Policy.